Summary:
1 - Basic concepts of vacuum technology
2 - Low pressure plasma
3 - Industrial plasma sources
4 - Industrial plasma processes (PVD, PECVD)
5 - Equipment technology for coating and modifying processes low pressure plasma surfaces
6 - Technology for target production for cathodic Spraying processes
7 - Layers of high hardness (attrition and wear)
8 - Optical layers (antireflective coating, thermal insulation, Solar Control, electrochromic and thermochromic layers)
9 - Thin coatings for (HD, CD, DVD, rewritable, MO) and to Displays (PED, LCD, PDP, OLED)
10 - Layers for solar technology-
11 - Metallization of microchip and Catalytic layers
12 - Coating of plastic sheet and metals and Coating of large area substrates
13 – TRIM and SRIM Simulations (http://www.srim.org/) The Stopping and Range of Ions in Matter
Bibliography:
[1] Donald L.Smith. Thin-Film Deposition - Principles & Practice. McGraw-Hill, New York 2006.
[2] N.G. Einspruch and D.M. Brown, Eds., "Plasma Processing for VLSI", Vol. 8 in "VLSI Electronics Microstructure Science", Academic Press, Boston, MA (1984).
[3] F.K. McTaggart, "Plasma Chemistry in Electrical Discharges", Elsevier, Amsterdam, NL (1967).
[4] Macleod, H. Angus, Thin-Film Optical Filters. Institute of Physics Publishing, 2002, 641 S, ISBN 0 7503 0688 2.
[5] Francis T.S. Yu, Optical Storage and Retrieval, CRC (1996), ISBN 0824797078.
[6] Terry W. McDaniel (Editor), Randall Victora (Editor), Handbook of MagnetoOptical Data Recording: Materials, Subsystems, Techniques , Noyes Publications (1997) , ISBN 0815513917.
[7] Erwin R. Meinders , Andrei V. Mijiritskii , Liesbeth van Pieterso, Matthias Wuttig , Optical Data Storage: Phasechange media and recording (Philips Research Book Series) , Springer (2006) , ISBN 1402042167.
[8] C. Dennis Meer, Eric D. Daniel (Author), Magnetic Recording Technology , McGraw-Hill Professional, (1996) , ISBN 0070412766.
[9] Jerry C. Whitaker , Electronic Displays: Technology, Design, and Applications, McGraw-Hill Professional Publishing (1994), ISBN 0070696217.
[10] Lindsay MacDonald (Editor), Anthony C. Lowe (Editor), Display Systems: Design and Applications , Wiley (1997) ISBN 0471958700.
[11] Gregory Crawford (Editor), Flexible Flat Panel Displays , Wiley (2005), ISBN 0470870486.
[12] Klaus Müllen (Autor), Ullrich Scherf , Organic Light - Emitting Devices. Synthesis, Properties and Applications, Wiley-VCH; (2005), ISBN 3527312188.
[13] K. Wetzig, C. M. Schneider: Metal Based Thin Films for Electronics, Wiley-VCH 2003.
[14] Ziegler, J. F., Biersack, J. P., & Marwick, D. (2000). SRIM-2000 The Stopping and Range of Ions in Matter. IBM-Research, Yorktown, NY, 10598.
Plasma theory : 1a Lecture- plasma-part1 2a Lecture- Plasma part 2
Deposition process : 3a Lecture- Deposition 1 4a Lecture- Deposition 2 5a Lecture- Deposition 3
6a Lecture- Deposition 4 7a Lecture- Deposition 5 8a Lecture- Deposition 6
9a Lecture- Deposition 7 10a Lecture- Deposition 8
Plasma Tecnology : 11a Lecture- Technology1 12a Lecture- Tecnology2 13a Lecture- Tecnology3
SRIM/TRIM Simulation link class report-1
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